Chapter 232 The ambition is emerging, and the gap with the international top
“Currently, the dry etching process mainly includes three methods: ion milling etching, plasma etching and reactive ion etching.”
< br>"And these three options are far from Sub-milling and etching is the simplest, with relatively high controllability and high technological maturity. In fact, almost all relevant patents have been applied for. If you want to overtake in corners and avoid Western patent barriers, this solution is very useful. Difficult.”
“ In addition, this solution also has the disadvantages of the technology itself, that is, the etching selectivity is extremely poor, and special etching endpoint detection technology must be used. The etching rate is also relatively low, and the cost performance is quite low.”
< br>“As for plasma etching, although better etching selectivity and higher etching rate can be obtained by selecting and controlling the composition of the discharge gas, the etching accuracy is not high and can generally only be used in applications larger than 4-5 micron line process ”
"The ongoing project in our experiment is the reactive ion etching plan designed by Mr. Wang!"
Chen Lingyue introduced it while leading Yin Zhiyao and others towards the etching plan project area.
After hearing Chen Lingyue's introduction, Yin Zhiyao's expression did not change much.
He has already read the paper. Although he was a little surprised by Wang Donglai's quick action and directly verified it in his own laboratory, if that was all, it could only be regarded as average and quite satisfactory.
In fact, not only Wang Donglai can see Yin Zhiyao's inner thoughts, but Chen Lingyue can also see it.
We were speechless all the way, and we quickly arrived at the place.
As a boss who has been immersed in the etching industry for decades, Yin Zhiyao constantly evaluates this laboratory in his heart.
“It seems that Galaxy Technology is still willing to invest in this aspect!”
When he saw the experimental project, Yin Zhiyao became extremely serious.
Looking at the instrument without blinking.
Modern dry etching equipment includes complex mechanical, electrical and vacuum devices, and is also equipped with automated etching endpoint detection and control devices. It is expensive and few laboratories are fully equipped.
And now, Yin Zhiyao has these instruments in front of him.
These instruments have also been manually repaired and adjusted to verify Wang Donglai's reactive ion etching plan.
To be honest, if Chen Lingyue had not joined Galaxy Technology, it would have taken more than half a year or even longer to put together these instruments.
As for the principle of reactive ion etching, it is quite simple.
This etching process has both physical and chemical effects. Glow discharge is performed under a low vacuum of a few tenths to tens of Pascals. The silicon wafer is at the cathode potential. Most of the potential during discharge falls near the cathode, and a large amount of electricity is charged. The particles are accelerated by the electric field perpendicular to the surface of the silicon wafer, are vertically incident on the surface of the silicon wafer, and are physically etched with a large momentum. At the same time, they also undergo a strong chemical reaction with the surface of the film to produce chemical etching.
Selecting the appropriate gas components not only achieves ideal etching selectivity and speed, but also shortens the lifetime of the active groups, which effectively inhibits the formation of these groups near the film surface. The lateral reaction caused by diffusion greatly improves the anisotropic characteristics of etching.
Reactive ion etching is also a promising etching method in VLSI technology.
When Wang Donglai was conceiving the plan, he originally thought of just coming up with an ion etching plan. However, in the state of [brain overclocking], he had countless inspirations and developed a brand new reaction. Ion etching scheme.
After the design was completed, it was sent to Chen Lingyue for verification in the laboratory.
After almost two days of equipment adjustment, today is the time for verification.
After the operator repeatedly checked that everything was correct, Chen Lingyue ordered the verification to begin.
“Buzz!”
The machine buzzed gently, and immediately the instrument began to move.
At this moment, Yin Zhiyao wanted to take off his eyes and put them on to see, so as not to miss any key information.
It has to be said that when faced with this aspect, Yin Zhiyao's love was extremely sincere and enthusiastic.
When Wang Donglai, Chen Lingyue and others saw Yin Zhiyao's performance, they couldn't help but feel a little admiration for Yin Zhiyao.
After all, it is really good that someone at such an old age can still maintain such a mentality towards technology.
It’s just an etching process, and it doesn’t actually take long.
So, soon the instrument stopped.
Yin Zhiyao, on the other hand, immediately wanted to go in and see the result, so he looked at Wang Donglai and was about to ask for advice.
Before Yin Zhiyao could say anything, Wang Donglai nodded and said, "Mr. Yin is an expert in this field, you can check it out!"
Wang Donglai was full of confidence and not afraid of any problems. .
Yin Zhiyao was not polite, nodded, and immediately walked in and started checking.
The more he looked, the more Yin Zhiyao was amazed.
As an old expert who has been immersed in this industry for decades, he has actually developed many advanced etching solutions.
Logically speaking, in fact, facing the etching plan designed by Wang Donglai, one should not be so excited and take it seriously.
But that’s not actually the case.
Because of a very simple truth, the further technology develops, the greater the constraints it will encounter, and the more things it will need to avoid.
There have been so many etching solutions. If people want to avoid them later, they need more knowledge reserves and the design needs to be more sophisticated.
After reading Wang Donglai's paper, Yin Zhiyao has already concluded that Wang Donglai is a genius in this field.
Moreover, the information revealed in the paper also made Yin Zhiyao full of expectations.
So, at this moment, Yin Zhiyao can be said to have used his greatest energy to observe and check.
It took half an hour to test.
After putting down the finished product, Yin Zhiyao’s eyes were extremely bright.
Because he has determined that Wang Donglai's etching plan is indeed qualified, even excellent.
It’s not like a design solution that just appeared, it’s more like a mature solution that has been running for many years, and there is nothing picky about it at all.
Perfect!
This can only be used to describe it.
After making his judgment in his mind, Yin Zhiyao was both excited and nervous.
The excitement is that through this design plan, he can clearly say that there is no big problem in the localization of etching equipment.
The tension lies in the fact that Wang Donglai's performance has made him, the boss of Zhongwei Company, a little worried about the development of his company.
After all, he already knew that Wang Donglai's Galaxy Technology would develop in the semiconductor industry.
With such a leader to overcome difficulties, he knows very well what will happen.
Because that’s how he came here at the beginning.
"Mr. Yin, what do you think?"
Wang Donglai walked over and asked with a smile.
"Mr. Wang, compared with you, I feel that my life has been in vain these past few decades, and my future life is terrible!" Yin Zhiyao did not hide his attitude at all, and said mockingly with a wry smile on his face.
"If that's the case, then Mr. Yin might as well go for a walk with me?"
Wang Donglai stretched out his hand and invited Yin Zhiyao.
"Okay!"
Yin Zhiyao is not stupid, and naturally understands that Wang Donglai must have something important to say when he invites him like this.
As a result, the two started walking around the laboratory again.
Artificial intelligence medical projects, lithium battery projects, drone projects...
Walking through each project area, Wang Donglai also gave a brief introduction to Yin Zhiyao.
Finally, after returning to the office, Yin Zhiyao gradually began to think about Wang Donglai's thoughts and plans.
"Mr. Wang, people don't tell secrets. Yesterday you said you were going to work together. What plan did you follow?"
Yin Zhiyao didn't hide it and asked directly.
Because he knew that he was at a disadvantage and had little room for bargaining.
It does not mean that without this design plan, your company will go bankrupt and cannot continue to operate.
It’s just that the development of our own company is slower and it will be a few years later to make profits.
However, now that he has seen Wang Donglai’s strong ability to design plans, he will naturally not let go of this opportunity.
In the business field, no one wants to have one more competitor.
Wang Donglai was not surprised that Yin Zhiyao took the initiative to ask. On the contrary, he expected it.
"Mr. Yin, how do you think the domestic semiconductor industry should develop better?"
Wang Donglai did not directly answer Yin Zhiyao's question, but asked another question.
Yin Zhiyao was stunned for a moment before speaking out: "In fact, there are already many semiconductor equipment companies in China. From lithography machines to wafer fabs to chip design, there are companies that are quietly working on it. Development. ”
“Although there are still big gaps compared with foreign countries in some areas, they have been solved. The problem is to start from scratch. Next, we only need to invest heavily in funds and talents, and then slowly catch up through the accumulation of time.”
“Our country has a large population and a huge population. Based on the basics, there are many corresponding talents, and the speed of catching up should not be too slow.”
Just as Yin Zhiyao was saying this, Wang Donglai suddenly interrupted Yin Zhiyao's words.
"How many years does Mr. Yin think it will take to catch up?"
Yin Zhiyao didn't care that Wang Donglai interrupted his speech, pondered for a while, gave a time, and said: "Quickly If you do it, you can catch up in thirty years; if you do it slowly, it will be almost fifty years.”
This time is not Yin Zhiyao’s nonsense, but that as a veteran in the industry, he combines what he knows. situation and judgment made.
Right now, domestic lithography machines and other fields are lagging behind the 20 years of technology accumulation of foreign companies. The country is catching up, and foreign countries are also making progress. If everything goes well, it will be impossible to catch up. Just twenty years.
In this regard, Yin Zhiyao took into account the prerequisites of strong national support and investment of large amounts of funds and talents in research and development.
Without these prerequisites, the speed of catching up will only be slower.
"Mr. Yin, thirty or fifty years is too long. Life is short, seize the day!"
"And if the time is extended to thirty or fifty years, who dares to say Nothing else has happened in such a long time.”
“In my opinion, the West may not give us such a long time to catch up. Let’s see how many accusations and prosecutions your company has suffered in just the past few years of its development. You can see what they think. .”
"The country imports hundreds of billions of semiconductors every year. This market is really too big. They will not just watch us break through safely."
"Patent barriers, technical sanctions , these methods are all foreseeable.”
“I wonder if Mr. Yin thinks what I said makes sense?”
After Wang Dong finished speaking, he looked at Yin Zhiyao quietly. Waiting for his answer.
Yin Zhiyao has been abroad for so many years, so he naturally knows the styles of these companies.
In particular, after he returned to China, he was successively sued by his two old employers, Linlin and Applied Materials, which had already made him thoroughly see the true face of these large companies that claimed to be free and democratic.
In these two lawsuits, if he had not been on guard from the beginning and avoided the patent dispute, I am afraid that Zhongwei Company would have been crushed and bankrupt.
Even so, Yin Zhiyao didn't think they would let him go. They must still be staring at him, always ready to take a bite.
However, even knowing this, Yin Zhiyao didn't really want to agree with Wang Donglai's thoughts.
Wang Donglai’s meaning can be seen clearly by Yin Zhiyao through this passage.
They just want to join forces to overcome difficulties together, localize them, and avoid Western patent restrictions!
The idea is a good idea, but it is unrealistic.
Thinking this in his heart, Yin Zhiyao spoke.
"What Mr. Wang said makes sense. Western companies are indeed like this. They rely on patent barriers and their own advanced technology to double their products and sell them to us, earning a lot of wealth. ”
“They are the ones who cut off people’s wealth and kill their parents. Every year the country imports hundreds of billions of dollars. The meat on the plate is not allowed to be touched by others. If someone is found to be trying to take it, they will immediately strike with thunder! Although this industry cannot be said to be monopolized by a few of them, it is definitely controlled by them! Several companies join forces to control and no new top giant companies are allowed to emerge.”
"Mr. Wang, if you want to localize the product, it's like snatching food from a tiger's mouth. It's very difficult!"
Yin Zhiyao shook his head and didn't say anything clearly, but he seemed to have said everything.
“I understand what President Yin said.”
Wang Donglai actually thought that Yin Zhiyao would reject his proposal, but he seemed very calm.
The atmosphere in the office also became a little quiet at this time.
"Mr. Wang, we are all Chinese. Since Mr. Wang has such ambitions, I naturally strongly support him. I may not be able to help in other fields, but in terms of etching, we at Zhongwei are doing our part."
"In this regard, I think we have a lot of room for cooperation. I wonder what Mr. Wang wants?"
Yin Zhiyao smiled and said to Wang Donglai, as if he had said nothing just now. Nothing ever happened.
"Okay, since Mr. Yin is interested, we can discuss the price of this etching solution."
Wang Donglai didn't care and expressed his thoughts immediately.
Immediately, the two started business negotiations in the office.
The original price of two million has been doubled several times.
At the same time, the two also reached certain agreements and agreements.
(End of this chapter)