Chapter 340 Meizizi’s supporting units
The Northeast Optics Institute received a request for the development of an optical system. The initiator of the request was from the 12th Machinery Department. As for what it was used for, there was no explanation.
The requirements are very considerately divided into two levels, and the implementation process is also divided into two steps.
The first step is to diffuse the laser beam with a wavelength of 355nm into a parallel beam with a diameter of 160mm.
The second step is to use this diffused parallel beam to re-project the image on the glass plate in the optical path into a 20mm light spot. It is required that after micro-projection, the graphic deformation should not exceed 5 microns, and the smaller the better.
This requirement may be simple but not easy. Even if it is troublesome, it doesn't seem to be very troublesome. It's just to the point where it seems like you can get it done with just a little effort.
For people who are engaged in technology, this kind of requirement is the most comfortable. It is not without challenge and sense of achievement, but it is not too demanding and difficult to achieve.
And the other party made it clear that it will be implemented in two steps. Once the first step is completed, submit the first step first. The first step should be done as quickly as possible. The second step can be done slowly, but the quality must be stable.
You can also submit the results step by step, which is even more comfortable.
The other party was even very considerate and sent a laser, which is a 355nm laser light source.
This is not a ruby laser. It was originally a YAG (yttrium aluminum garnet) laser prepared by Gao Zhendong for laser ranging. The power of this thing is relatively easy to increase, and the wavelength can be adjusted according to doping.
This is part of Gao Zhendong's integrated circuit process research at Factory 1274. You can tell at a glance that this thing is used for the optical path system of the lithography machine.
It was Gao Zhendong’s idea to divide the entire optical path system into two steps.
The first step is relatively simple. It can be used with contact or proximity lithography machines. Both of these are direct projections. The actual resolution is approximately the resolution of the template.
The second step is more difficult. Just wait for the Northeast Optics Institute to develop it slowly. This is expected to be used in projection lithography machines. It will not be a problem to build one in one, two or three years. Once it comes out, the proximity lithography machine will be enough. Once it is built, it will be a pure profit.
At the same time, comrades engaged in organic materials in a chemical research institute also received research requirements from the 12th Ministry of Machinery on photosensitive materials. The research requirements clearly stated that photosensitive materials can be photopolymerized, photodecomposed, or photocrosslinked. One of them, used for laser photosensitive imaging, the working light wavelength is 355nm.
The 12th Machinery Department also sent a laser and simple laser diffusion accessories to be used as the light source during the test.
To be honest, this is the first time for the comrades of the institute to see such clear requirements, with even the technical route clearly stated in the requirements document.
Even for the photo-cross-linked type, they only found out what was going on after reading the explanation in the requirements document.
It would be great if all demand parties were like this one, the comrades from the Institute of Chemistry thought happily, and they could still learn something!
In fact, this is something Gao Zhendong can't do. He doesn't know which one can be made now. In short, this thing existed in 1965. I simply wrote down the routes of several common photoresists. How can you make it? Regardless of the type, it is nothing more than the difference between positive glue and negative glue, both can be used.
When a technology first emerges, the degree of freedom is the greatest. There is no need to consider too many details, and the supporting technology does not need to consider the performance differences caused by differences in technical routes, because the requirements are not that high yet. , probably as long as it can be used, and it counts as a skill.
A lot of advanced technologies such as photolithography in the future do not need to be considered in this era. They are simply not used and there is no condition to use them.
To develop 10 micron to 100 micron lithography, just thinking about immersion lithography, multiple exposures, EUV light sources, etc. is undoubtedly full.
Not to mention these wonderful supporting factories, Gao Zhendong himself is studying the workpiece table with a bunch of eighth-level workers in the factory. Although he does not engage in multiple exposures, overlay engraving is still needed for workpieces. The positioning accuracy of the station still needs to be considered.
Overlay engraving is to engrave multiple graphics onto the same workpiece multiple times to form a complete graphics.
If you only engrave once, you don’t need to worry about the engraving accuracy. You just need to ensure that the light projection range is on the wafer and the light projection accuracy is enough. However, in the integrated circuit process, it needs to be divided many times. Photolithography is used to form different structures, and there are circuit connections between these structures, so the overlay accuracy must be guaranteed.
As for the double workpiece table, let’s just put it aside for now. One workpiece table has not been neatly installed yet. If you think about it so much, you are causing trouble for yourself.
"Mr. Gao, the positioning accuracy of your thing is half a millimeter?" A group of old eighth-level workers gnashed their teeth.
1 wire, from a machining perspective, is equal to 10 microns, half wire, 5 microns.
Gao Zhendong nodded: "Well, let's not consider the mobile positioning accuracy first, just consider the relative positioning accuracy when the two workpieces are fixed."
If the micro-projection has not been figured out, then the mobile positioning accuracy will be It doesn't make much sense, because there is no need to engrave one chip on the wafer, but to project the image of the entire wafer at once. In this case, even if overlay engraving is done, the main considerations are when fixing the template and the wafer. relative position accuracy. This is why we all used contact or proximity lithography machines at the beginning. The technology is much simpler.
Several masters, including Yi Zhonghai, have given up most of their minds, and this will be much easier to handle.
Gao Zhendong sent them the requirements for the entire mechanical part of the lithography machine and explained to them one by one. The lithography machine is not just about the previous things, such as photoresist coating and dust-free environment. Generate etc
In fact, the early photolithography machines looked like ventilation cabinets in a chemical laboratory, and they also had microscopes for manual adjustment and observation. They also looked like biological gadgets, but they didn’t look like industrial machines anyway. , not at all as tall as it seemed later.
After listening to Gao Zhendong’s request, all the old masters felt that there was a way to do this and it was not a big problem. They went to work after receiving the task. Some of these old masters were from the third factory, and some were from other factories. He was temporarily borrowed from the workshop to help. No matter where he came from, he would have to work in the research field of the third factory during this period of time.
As for other parts of the process, they are all handed over to 1274 Factory. Their conditions are mature and they are still professional semiconductor factories after all.
At the same time, the security director was talking to Liu Haizhong. Although Liu Haizhong was also an old blacksmith, he was still far away from the eighth level, and he was not enough to blend in the special projects of the third factory. As for Liu Haizhong, In terms of production, he is not from the third factory, let alone one.
The director of security came to talk to him because he had something good to do, at least in his opinion.
"Master Liu, you are an old comrade in the factory. Judging from your consistent performance, you are very attentive and active in our security and safety work."
Director Zhang of the Security Department first came up. He praised Liu Haizhong fiercely, and Liu Haizhong felt extremely comfortable, and his mind couldn't help but feel a little alive.
Old Liu, is this about to turn around? Has the leader finally seen my efforts? Are you willing to give me a chance and increase my burden?
Just when he was thinking about it and having sweet dreams, he heard the sound of nature.
“Your performance is seen and kept in mind by the factory, so now I have a burden, and I want to see if you are willing to take it on?”
< br>
After a lot of compliments, Director Zhang finally told him the reason for calling him here this time, which made Liu Haizhong extremely anxious.
A burden? Take a pick?
Speaking of this, Liu Haizhong was no longer sleepy. There was a thunder in his head. Let me just say, my efforts and attitude will not be ignored by the leaders.
His culture cannot come up with words such as "Pearls are covered in dust" or "Talent is not appreciated". In short, he thinks quite simply.
There is a burden, right? Before I heard what it was, Liu Haizhong nodded hurriedly: "I am willing, I am willing, please organize and the masses to test me."
He had heard this kind of talk a lot on the radio and said it smoothly.
Director Zhang frowned: "Master Liu, don't worry, don't worry, you are not yet a member of the organization, so you don't need to be tested by the organization."
I have long heard that this Liu Haizhong is a bit I was so obsessed with making progress that it seemed a little abnormal now.
“Oh oh oh, please feel free to give me the burden in the factory, I will never frown.” The heavier the burden, the higher the position.
It's not that bad, Director Zhang thought in his heart, and said: "That's it. The production tasks and products produced by our factory are becoming more and more important. In order to ensure the safety of production work, , the factory decided to increase the intensity of security patrols. As a result, it is not enough to rely solely on the strength of our security department and militia. The factory hopes to select a group of old comrades and combine them with the old to lead them. Xin, increase the patrol strength. But let’s talk about it first, there is no extra salary for this matter, just keep your original salary.”
Are you going to the security office? The center of bangs started to look forward to. What is salary? Am I still short of salary? After all, he is a high-level technician, isn't he? He has this in spades.
The scope of power and responsibilities of the Security Department these days is not generally large, especially for a large factory like the No. 3 Rolling Mill, which is very impressive.
“Based on Master Liu’s usual performance, you are a priority this time. The Security Department hopes that you can serve as the patrol team leader and lead two young comrades to use your spare time to What do you think, Master Liu, of contributing to the factory's security work? Of course, this is entirely voluntary and will not be forced. A patrol team of this kind will be set up, and it will not affect the work if you are not willing. "
When Liu Haizhong heard this, he was in a dilemma.
Go ahead, co-authoring this is a part-time job, and you have to do your own serious work.
If you want to say that you don't want to do it, after all, you are a team leader and leading two people. Maybe this is the first step in your official career? After passing this village, there may not be this store.
Just as his bangs were swaying unsteadily, Director Zhang put the last camel back on the straw in his heart.
(End of this chapter)